Shaping the future with sensor technology
Micro-Epsilon History
Shaping the future with sensor technology! We have been developing innovative sensor products with greater precision for the industries of the future for more than 55 years. Through our innovations, we have repeatedly set milestones in sensor technology.
With more than 27 companies and more than 1500 employees, we have grown into an internationally active group of companies.
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1968 Foundation of Micro-Epsilon by engineer Franz Frischen
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1975 Relocation to the current headquarters in Ortenburg
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1980 Development of the first
eddy current displacement measuring system
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1988 Launch of the world's most compact eddy current sensor
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1991 Establishment of the
Micro-Epsilon company group
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1992 Launch of the first digital
laser triangulation sensors -
1993 Draw-wire displacement sensors for series integration
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1996 Introduction of measuring systems
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2003 Launch of laser scanners for
dimensional measurement tasks
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2006 A world first - the most compact
confocal displacement sensors -
2007 3D inspection systems for
defect detection on car bodies
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2008 High-precision sensors monitor the positioning of space telescopes
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2011 World first
Blue laser sensors
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2012 Introduction of high-precision inline color measuring systems
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2019 Micro-Epsilon receives the
"Strategic Partner Status"
from Zeiss SMT
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2020 White light interferometers for
industrial measurement tasks -
2023 Fast Steering Mirror for
communication satellites
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Today In the world's largest terrestrial reflector telescope ELT, sensors are used for fine positioning of the mirror segments
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Today High-precision sensors monitor semiconductor production with nanometer accuracy
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Today Turnkey systems monitor the thickness of coated battery films
