Inspection of the orientation notches on silicon ingots

Ingots are often provided with orientation notches, which are necessary for the alignment of the ingots. Blue laser scanners from Micro-Epsilon are used to inspect the profile of the notches for dimensional accuracy. They detect the notch profile with high accuracy. The scanners are guided over the ingot and determine high-precision profile data. The innovative Blue Laser technology enables measurement acquisition with high signal stability.